QB3-Berkeley brought the first focused-ion-beam microscope to the UC Berkeley campus in 2011, in collaboration with multiple academic units.
Recent advances have lead to the development of a new class of ion-beam microscope known as the helium-ion microscope (HIM), which produces an intense beam of helium ions formed by gas field-ionization at the apex of an atomically sharp tungsten tip. With the HIM, researchers can achieve charged-particle-based surface imaging, analysis and nanofabrication with unprecedented spatial resolution topographic and compositional contrast.
|The FIB instrument in the BNC is an FEI Quanta 3D FEG that in addition to the Ga+ beam incorporates a second column for scanning electron microscopy (SEM). Learn more about the dual-beam FIB microscope.|
|The HIM instrument in the BNC is a Zeiss ORION NanoFab that enables the user to work with He+ or Ne+ beams generated from the HIM source and also incorporates a separate Ga+ FIB column. Learn more about the multi-beam HIM instrument.|
Use of the FIB and HIM instruments is available to BNC members. Please visit the BNC website for membership information and rates.